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Original title:
Hiding e-beam exposure fields by deterministic 2D pattering
Authors: Horáček, Miroslav ; Knápek, Alexandr ; Matějka, Milan ; Krátký, Stanislav ; Urbánek, M. ; Mika, Filip ; Kolařík, Vladimír
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Year: 2018
Language: eng
Abstract: The high stability and good current homogeneity in the spot of the e-beam writer is crucial to\nthe exposure quality, particularly in the case of large-area structures when gray-scale\nlithography is used. Even though the deflection field distortion is calibrated regularly and\nbeam focus and beam astigmatism is dynamically corrected over the entire deflection field, we can observe disturbances in the exposed relief.\nRecently, we presented a method that makes use of e–beam exposure imperfection by\nintroducing marginally visible high–frequency diffraction gratings of variable pitch that fill in\nseparate orthogonal exposure fields. The actually presented approach follows up our\nresearch on aperiodic arrangements of optical primitives, especially on the phyllotactic–\nlike arrangement of sub–micron relief optical elements. This approach is extended from the\ndiffraction element arrangement to the higher level of exposure fields arrangements.
Keywords: electron beam lithography; phyllotaxis
Project no.: TE01020233 (CEP), TG03010046 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0287595
Permalink: http://www.nusl.cz/ntk/nusl-387503
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Horáček, Miroslav ; Knápek, Alexandr ; Matějka, Milan ; Krátký, Stanislav ; Urbánek, M. ; Mika, Filip ; Kolařík, Vladimír
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Year: 2018
Language: eng
Abstract: The high stability and good current homogeneity in the spot of the e-beam writer is crucial to\nthe exposure quality, particularly in the case of large-area structures when gray-scale\nlithography is used. Even though the deflection field distortion is calibrated regularly and\nbeam focus and beam astigmatism is dynamically corrected over the entire deflection field, we can observe disturbances in the exposed relief.\nRecently, we presented a method that makes use of e–beam exposure imperfection by\nintroducing marginally visible high–frequency diffraction gratings of variable pitch that fill in\nseparate orthogonal exposure fields. The actually presented approach follows up our\nresearch on aperiodic arrangements of optical primitives, especially on the phyllotactic–\nlike arrangement of sub–micron relief optical elements. This approach is extended from the\ndiffraction element arrangement to the higher level of exposure fields arrangements.
Keywords: electron beam lithography; phyllotaxis
Project no.: TE01020233 (CEP), TG03010046 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0287595
Permalink: http://www.nusl.cz/ntk/nusl-387503
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2018-11-15, last modified 2022-09-29