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Signal Detection by Segmental Ionization Detector in Environmental SEM
Černoch, Pavel ; Jirák, Josef (advisor)
The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
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Signal Detection by Segmental Ionization Detector in Environmental SEM
Černoch, Pavel ; Jirák, Josef (advisor)
The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
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Optimalizace detekce sekundárních elektronů segmentovým ionizačním detektorem v environmentálním REM
Černoch, P. ; Jirák, Josef
The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement.
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Study of contrast mechanisms in environmental scanning electron microscopy
Wandrol, Petr
The main goal of the work is study of contrast materials in environmental scanning electron microscopy. I will concentrate to the design and construction of the original detector of secondary electrons, which is not influenced by backscattered electrons as well as to scintillation detector of backscattered electrons on the basis of single-crystal YAP in the dissertation work. For successful solution of the topic it will be necessary to manage the theory of the influence of magnetic fields on trajectories of electrons. The knowledge of the software SIMION, version 7.0 will be necessary too, together with studying of the theory for assessment of suitable vacuum conditions in differential chambers.
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Imaging of the voltage contrast in environmental SEM
Romanovský, Vladimír ; Autrata, Rudolf
Current methodology of imaging in the scanning electron microscopy is based on the detection of signal electrons that carry topografic and materialcontrast of specimens under study. Electronic devices can be observed because in their standard working mode voltage differences on component surfaces are visualized by means of the voltage contrast. This contrast can be acquired in nearly any commercially available scanning electron microscopeby detection and subsequent analysis of secondary electrons.
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