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National Repository of Grey Literature

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	Imaging properties of Everhart-Thornley detector Novák, Libor ; Müllerová, Ilona The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experiment results showing signal properties in individual parts of the detector are presented. Different detection modes are compared using numerical simulation of the E.-T. detector. Detailed record
	Zpracování signálu Everhart-Thornleyho detektorem Novák, Libor ; Müllerová, Ilona The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector. Detailed record
	Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM Autrata, Rudolf ; Jirák, Josef ; Romanovský, Vladimír ; Špinka, Jiří Specimen observation at a low accelerating voltage of the electron beam (around 1kV) is a new and attractive technique of scanning electron microscopy. While detection to the signal of secondary electrons (SE) with the help of the scintillation-photomultiplier system described by Everhart-Thornley does not depend on the primary beam energy, the detection of backscattered electrons (BSE), having their energy only a bit lower than energy of the beam, is limited by a low sensitivity of semiconductor or channel plate detectors to channel plate detectors to electrons of energy below 2 keV. Detailed record

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