|
|
Precision displacement interferometry with stabilization of wavelength on air
Lazar, Josef ; Holá, Miroslava ; Hrabina, Jan ; Buchta, Zdeněk ; Číp, Ondřej
We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 10'6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1 O'8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third represents a reference for stabilization of the wavelength of the laser source. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
|
|
| |
|
| |
|
|
Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser
Hrabina, Jan ; Lazar, Josef ; Číp, Ondřej
One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches – at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results.
|
|
|
Differential interferometry with suppression of the influence of refractive index of air for nanometrology
Holá, Miroslava ; Číp, Ondřej ; Hrabina, Jan ; Buchta, Zdeněk ; Lazar, Josef
We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
|
|
| |
|
|
Interferometer controlled positioning for nanometrology
Lazar, Josef ; Číp, Ondřej ; Čížek, Martin ; Hrabina, Jan ; Šerý, Mojmír ; Klapetek, P.
We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom.
|
|
|
Absolutní frekvenční posuvy jodem stabilizovaných laserových etalonů zpusobené čistotou jodu absorpčních kyvet
Hrabina, Jan ; Jedlička, Petr ; Číp, Ondřej ; Lazar, Josef
Results of measurement of purity of a set of iodine cells for laser stabilization made at our institute are presented. The purity was tested by improved method based on measurement of induced fluorescence and evaluation by the Stern-Volmer formula. This method was improved by innovation of the fluorescence detection system by introducing compensation for the pumping laser spectral and power instabilities. Further the absolute frequencies of selected iodine hyperfine transitions were measured in direct laser frequency comparison performed with a set of iodine-stabilized Nd:YAG laser etalons with the reproducibility well below the kHz level. The results indicating the iodine cell purity are presented with relation to the absolute frequency shifts. This highlights the influence of iodine cell quality onto the stability and absolute frequency of lasers etalons and also shows the way towards improvements of the iodine cell manufacturing technology.
|
|
|
Měření čistoty jódu v absorpčních kyvetách pro frekvenční stabilizaci laserů
Hrabina, Jan ; Petrů, František ; Jedlička, Petr ; Číp, Ondřej ; Lazar, Josef
In the contribution we present a system for measurement of iodine purity by means excitation of a selected strong transition, measurement of induced fluorescence and evaluation by the Stern-Volmer formula. The arrangement is based on a pumping Ar-ion laser tuned to the transition of interest but its linewidth far exceeds the transition. Frequency noise of the laser is effectivelly reduced by monitoring the fluorescence in a second, reference iodine cell and together with monitoring of the laser power enables cancelation of the frequency noise influence which generates errors by demodulating on the absorption profile. The level of the scattered light is subtracted as well. All the measured data are digitally processed and the experiment is fully computer controlled.
|
guest ::
RSS feed.