guest ::
| Home > Conference materials > Papers > Precision displacement interferometry with stabilization of wavelength on air |
Original title:
Precision displacement interferometry with stabilization of wavelength on air
Authors: Lazar, Josef ; Holá, Miroslava ; Hrabina, Jan ; Buchta, Zdeněk ; Číp, Ondřej
Document type: Papers
Conference/Event: Optics and Measurement 2012, Liberec (CZ), 2012-10-16 / 2012-10-18
Year: 2012
Language: eng
Abstract: We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 10'6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1 O'8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third represents a reference for stabilization of the wavelength of the laser source. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
Keywords: interferometry; nanometrology; nanopositioning; Refractometry
Project no.: GA102/09/1276 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, GPP102/11/P820 (CEP)
Funding provider: GA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA ČR
Host item entry: Optics and Measurement 2012. Proceedings of the International Conference, ISBN 978-80-87026-02-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215508
Permalink: http://www.nusl.cz/ntk/nusl-135545
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Lazar, Josef ; Holá, Miroslava ; Hrabina, Jan ; Buchta, Zdeněk ; Číp, Ondřej
Document type: Papers
Conference/Event: Optics and Measurement 2012, Liberec (CZ), 2012-10-16 / 2012-10-18
Year: 2012
Language: eng
Abstract: We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 10'6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1 O'8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third represents a reference for stabilization of the wavelength of the laser source. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
Keywords: interferometry; nanometrology; nanopositioning; Refractometry
Project no.: GA102/09/1276 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, GPP102/11/P820 (CEP)
Funding provider: GA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA ČR
Host item entry: Optics and Measurement 2012. Proceedings of the International Conference, ISBN 978-80-87026-02-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215508
Permalink: http://www.nusl.cz/ntk/nusl-135545
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-01-04, last modified 2021-11-24