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Original title:
Differential interferometry with suppression of the influence of refractive index of air for nanometrology
Authors: Holá, Miroslava ; Číp, Ondřej ; Hrabina, Jan ; Buchta, Zdeněk ; Lazar, Josef
Document type: Papers
Conference/Event: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Year: 2012
Language: eng
Abstract: We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
Keywords: interferometry; nanometrology; nanopositioning; refraktometry
Project no.: GA102/09/1276 (CEP), GPP102/11/P820 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01
Funding provider: GA ČR, GA ČR, GA TA ČR, GA TA ČR, GA MŠk
Host item entry: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215564
Permalink: http://www.nusl.cz/ntk/nusl-135488
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Holá, Miroslava ; Číp, Ondřej ; Hrabina, Jan ; Buchta, Zdeněk ; Lazar, Josef
Document type: Papers
Conference/Event: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Year: 2012
Language: eng
Abstract: We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range acting as a tracking refractometer. The principle is demonstrated on an experimental setup and a set of measurements describing the performance is presented.
Keywords: interferometry; nanometrology; nanopositioning; refraktometry
Project no.: GA102/09/1276 (CEP), GPP102/11/P820 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01
Funding provider: GA ČR, GA ČR, GA TA ČR, GA TA ČR, GA MŠk
Host item entry: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215564
Permalink: http://www.nusl.cz/ntk/nusl-135488
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-01-04, last modified 2021-11-24