Original title: Interferometer controlled positioning for nanometrology
Authors: Lazar, Josef ; Číp, Ondřej ; Čížek, Martin ; Hrabina, Jan ; Šerý, Mojmír ; Klapetek, P.
Document type: Papers
Conference/Event: NANOCON 2010. International Conference /2./, Olomouc (CZ), 2010-10-12 / 2010-10-14
Year: 2010
Language: eng
Abstract: We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom.
Keywords: interferometry; local probe microscopy; nanometrology; nanopositioning
Project no.: CEZ:AV0Z20650511 (CEP), LC06007 (CEP), KAN311610701 (CEP), GA102/09/1276 (CEP)
Funding provider: GA MŠk, GA AV ČR, GA ČR
Host item entry: 2nd International Conference NANOCON 2010, ISBN 978-80-87294-19-2

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0191768

Permalink: http://www.nusl.cz/ntk/nusl-42191


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