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Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser
Hrabina, Jan ; Lazar, Josef ; Číp, Ondřej
One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches – at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results.
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Laser interference nano-comparator for length sensor calibration in nanometric scale
Číp, Ondřej ; Mikel, Břetislav ; Čížek, Martin ; Šmíd, Radek ; Buchta, Zdeněk ; Lazar, Josef
In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which are used for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.
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Interferometer controlled positioning for nanometrology
Lazar, Josef ; Číp, Ondřej ; Čížek, Martin ; Hrabina, Jan ; Šerý, Mojmír ; Klapetek, P.
We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom.
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Absolutní frekvenční posuvy jodem stabilizovaných laserových etalonů zpusobené čistotou jodu absorpčních kyvet
Hrabina, Jan ; Jedlička, Petr ; Číp, Ondřej ; Lazar, Josef
Results of measurement of purity of a set of iodine cells for laser stabilization made at our institute are presented. The purity was tested by improved method based on measurement of induced fluorescence and evaluation by the Stern-Volmer formula. This method was improved by innovation of the fluorescence detection system by introducing compensation for the pumping laser spectral and power instabilities. Further the absolute frequencies of selected iodine hyperfine transitions were measured in direct laser frequency comparison performed with a set of iodine-stabilized Nd:YAG laser etalons with the reproducibility well below the kHz level. The results indicating the iodine cell purity are presented with relation to the absolute frequency shifts. This highlights the influence of iodine cell quality onto the stability and absolute frequency of lasers etalons and also shows the way towards improvements of the iodine cell manufacturing technology.
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