Original title: Study of Mechanical Properties of Metallic Surface Layers on Silicon Substrates
Translated title: Studium mechanických vlastností kovových vrstev na křemíkové podložce
Authors: Dušek, J. ; Buršíková, V. ; Sobota, Jaroslav ; Buršík, Jiří ; Bláhová, O. ; Klapetek, P. ; Vladoiu, R. ; Navrátil, V.
Document type: Papers
Conference/Event: Nano'07 - International Conference on Nanosciences and Nanotechnologies in the Czech Republic /6./, Brno (CZ), 2007-10-08 / 2007-10-10
Year: 2007
Language: eng
Abstract: [eng] [cze]
The mechanical properties of metallic thin films deposited on silicon by magnetron sputtering and Thermoionic vacuum arc were studied using two different type of indentation methods - the depth sensing indentation test (DSI) and the continuous stiffness measurement method (CSM). Mechanické vlastnosti tenkých kovových vrstev deponovaných na křemíkovou podložku magnetronovým naprašováním a termoionickým vakuovým obloukem byly studovány použitím dvou různých indentačních metod DSI a CSM.
Keywords: metallic surface layers; silicon substrates
Project no.: CEZ:AV0Z20650511 (CEP), CEZ:AV0Z20410507 (CEP), KAN311610701 (CEP)
Funding provider: GA AV ČR
Host item entry: Nano'07 - 6th International Conference on Nanosciences and Nanotechnologies in the Czech Republic, ISBN 978-80-214-3460-8

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0154191

Permalink: http://www.nusl.cz/ntk/nusl-38121


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers