Original title: Laser interference nano-comparator for length sensor calibration in nanometric scale
Authors: Číp, Ondřej ; Mikel, Břetislav ; Čížek, Martin ; Šmíd, Radek ; Buchta, Zdeněk ; Lazar, Josef
Document type: Papers
Conference/Event: NANOCON 2010. International Conference /2./, Olomouc (CZ), 2010-10-12 / 2010-10-14
Year: 2010
Language: eng
Abstract: In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which are used for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.
Keywords: interferometer; laser; nanoscale; precise measurement
Project no.: CEZ:AV0Z20650511 (CEP), LC06007 (CEP), KAN311610701 (CEP), GA102/09/1276 (CEP), FR-TI1/241 (CEP), GAP102/10/1813 (CEP)
Funding provider: GA MŠk, GA AV ČR, GA ČR, GA MPO, GA ČR
Host item entry: 2nd International Conference NANOCON 2010, ISBN 978-80-87294-19-2

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0191769

Permalink: http://www.nusl.cz/ntk/nusl-42192


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Research > Institutes ASCR > Institute of Scientific Instruments
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