|
|
Proceedings of works presented on the Seminar of Ph. D. students of Electron optics held on 16. December, 2002
Müllerová, Ilona
The volume contains extended abstracts or short manuscripts of contributions orally presented at one-day seminar of the doctoral students in Division of electron optics of the Institute of Scientific Instruments ASCR in Brno. The purpose of the first seminar of this kind, dated by the school year beginning in 2002, was to provide the students with opportunity to present and mutually confront their preliminary results and research plans and to pass the procedure of preparing and submitting a paper to proceedings.
|
|
|
Micro-machining by an electron beam
Zobač, Martin
The work deals with problems of removing material with an intensive electron beam (EB) in vacuum. The main goal is study of the interaction of EB with metallic and possibly non-metallic materials. An undividable part of the work is a preparation of an experimental device, its experimental parts and the electron gun. It will be necessary to create a unique electronics, especially a HV source enabling impulse operation of the electron gun.
|
|
|
Study of contrast mechanisms in environmental scanning electron microscopy
Wandrol, Petr
The main goal of the work is study of contrast materials in environmental scanning electron microscopy. I will concentrate to the design and construction of the original detector of secondary electrons, which is not influenced by backscattered electrons as well as to scintillation detector of backscattered electrons on the basis of single-crystal YAP in the dissertation work. For successful solution of the topic it will be necessary to manage the theory of the influence of magnetic fields on trajectories of electrons. The knowledge of the software SIMION, version 7.0 will be necessary too, together with studying of the theory for assessment of suitable vacuum conditions in differential chambers.
|
|
| |
|
| |
|
| |
|
|
Detection of backscattered electrons in the low energy area of the spectra of the electron beam in SEM
Přichystal, Vladimír
The work focuses especially on research of a detector for conjoint as well as separated detection of backscattered (BSE) and secondary (SE) electrons in a scanning electron microscope in conditions, where the energy of the impacting beam of primary electrons onto a specimen is 1 keV and less. The main goal is a design and realization of a detector for the electron scanning microscope JSM-6700F by the firm JEOL and following measurement of properties of this detector and its influence on the operation of the microscope.
|
|
|
The assessment of accurate trajectories of charged particles and errors of systems in particle optics
Oral, Martin
The work is supposed to deal with the design of a sufficiently effective method of computation of trajectories in particle-optical systems in general cases of non-adjusted optical systems (i.e. with errors in adjustment). Contemporarily, a method of computation in systems without these errors in adjustment by geometrical aberration theory of the 3rd order and chromatic theory of the 1st is developed, while it is principally possible to use aberration theories of higher orders (for achieving of higher exactness). It is necessary to include 'non-adjustment' of the optical system in the calculations. The neighbouring project is the computation of profiles of particles beams after processing by the optical system, in which the results of the main topic of the work have been exploited.
|
|
| |
|
| |
guest ::
