Original title: SMV-2023-61: Odměřovací systémy pro litografy
Translated title: SMV-2023-61: Measuring systems for lithographers
Authors: Mikel, Břetislav
Document type: Research reports
Year: 2023
Language: cze
Abstract: [cze] [eng]

Keywords: laser interferometry; laser source; measurement of lenght

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0349225

Permalink: http://www.nusl.cz/ntk/nusl-613895


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2024-04-15, last modified 2024-04-15


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