Original title: SMV-2023-04: Šablona pro bio–aplikace připravená elektronovou litografií
Translated title: SMV-2023-04: Template for bio–applications prepared by EBL
Authors: Kolařík, Vladimír ; Krátký, Stanislav ; Kopal, Jaroslav
Document type: Research reports
Year: 2023
Language: cze
Abstract: [cze] [eng]
Výzkumné a vývojové práce na technologii přípravy vzorků šablony pro bio–aplikace a realizaci otisků. Research and development of template samples for bio–applications and the realization of replicas.
Keywords: e–beam lithography; templates and replicas

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0348682

Permalink: http://www.nusl.cz/ntk/nusl-538341


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports