Original title: Use of electronics product definition for the development of differentially pumped chamber
Authors: Maxa, J. ; Neděla, Vilém
Document type: Papers
Conference/Event: EDS '10 - Electronic Devices and Systems IMAPS CS International Conference, Brno (CZ), 2010-09-01 / 2010-09-02
Year: 2010
Language: eng
Abstract: Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses 3nd compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
Keywords: CAx; Cosmos; EREM; FEI; SolidWorks
Project no.: CEZ:AV0Z20650511 (CEP), GAP102/10/1410 (CEP)
Funding provider: GA ČR
Host item entry: EDS'10 - Electronic Devices and Systems IMAPS CS International Conference 2010 - Proceedings, ISBN 978-80-214-4138-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0192070

Permalink: http://www.nusl.cz/ntk/nusl-42244


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers