Original title: Education and research at clean room laboratory for silicon device technology at Masaryk University
Authors: Mikulík, P. ; Humlíček, J. ; Kulha, P. ; Hovorka, Miloš ; Kadlec, Filip
Document type: Papers
Conference/Event: SILICON 2010 /12./, Rožnov pod Radhoštěm (CZ), 2010-11-02 / 2010-11-05
Year: 2010
Language: eng
Abstract: We present education and research at university clean room microelectronics laboratory for silicon device technology opened at Masaryk University in 2007. T
Keywords: clean room; microelectronic; silicon device technology
Project no.: CEZ:AV0Z20650511 (CEP), CEZ:AV0Z10100520 (CEP), IAA100100907 (CEP)
Funding provider: GA AV ČR
Host item entry: 12th Scientific and Business Conference SILICON 2010, ISBN 978-80-254-7361-0

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0191990

Permalink: http://www.nusl.cz/ntk/nusl-42237


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers