Original title:
Education and research at clean room laboratory for silicon device technology at Masaryk University
Authors:
Mikulík, P. ; Humlíček, J. ; Kulha, P. ; Hovorka, Miloš ; Kadlec, Filip Document type: Papers Conference/Event: SILICON 2010 /12./, Rožnov pod Radhoštěm (CZ), 2010-11-02 / 2010-11-05
Year:
2010
Language:
eng Abstract:
We present education and research at university clean room microelectronics laboratory for silicon device technology opened at Masaryk University in 2007. T
Keywords:
clean room; microelectronic; silicon device technology Project no.: CEZ:AV0Z20650511 (CEP), CEZ:AV0Z10100520 (CEP), IAA100100907 (CEP) Funding provider: GA AV ČR Host item entry: 12th Scientific and Business Conference SILICON 2010, ISBN 978-80-254-7361-0
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0191990