Název:
Laser interference nano-comparator for length sensor calibration in nanometric scale
Autoři:
Číp, Ondřej ; Mikel, Břetislav ; Čížek, Martin ; Šmíd, Radek ; Buchta, Zdeněk ; Lazar, Josef Typ dokumentu: Příspěvky z konference Konference/Akce: NANOCON 2010. International Conference /2./, Olomouc (CZ), 2010-10-12 / 2010-10-14
Rok:
2010
Jazyk:
eng
Abstrakt: In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which are used for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.
Klíčová slova:
interferometer; laser; nanoscale; precise measurement Číslo projektu: CEZ:AV0Z20650511 (CEP), LC06007 (CEP), KAN311610701 (CEP), GA102/09/1276 (CEP), FR-TI1/241 (CEP), GAP102/10/1813 (CEP) Poskytovatel projektu: GA MŠk, GA AV ČR, GA ČR, GA MPO, GA ČR Zdrojový dokument: 2nd International Conference NANOCON 2010, ISBN 978-80-87294-19-2
Instituce: Ústav přístrojové techniky AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0191769