Název:
Interferometer controlled positioning for nanometrology
Autoři:
Lazar, Josef ; Číp, Ondřej ; Čížek, Martin ; Hrabina, Jan ; Šerý, Mojmír ; Klapetek, P. Typ dokumentu: Příspěvky z konference Konference/Akce: NANOCON 2010. International Conference /2./, Olomouc (CZ), 2010-10-12 / 2010-10-14
Rok:
2010
Jazyk:
eng
Abstrakt: We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom.
Klíčová slova:
interferometry; local probe microscopy; nanometrology; nanopositioning Číslo projektu: CEZ:AV0Z20650511 (CEP), LC06007 (CEP), KAN311610701 (CEP), GA102/09/1276 (CEP) Poskytovatel projektu: GA MŠk, GA AV ČR, GA ČR Zdrojový dokument: 2nd International Conference NANOCON 2010, ISBN 978-80-87294-19-2
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0191768