Original title: 3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB)
Authors: Hradilová, Monika ; Jäger, Aleš ; Lejček, Pavel
Document type: Papers
Conference/Event: Metal 2010, Rožnov pod Radhoštěm (CZ), 2010-05-18 / 2010-05-20
Year: 2010
Language: eng
Abstract: The possibilities of analysis can be enhanced by utilizing focused ion beam (FIB). The FIB instrument allows revealing the structure in the third dimension by controlled and precise milling of the material. In combination with electron beam and suitable detector is possible to describe crystallography (EBSD) or chemical composition (EDS) etc. in three dimensions (3D). Thus, it is feasible to define real size, shape and distribution of microstructure features such as grains, grain boundaries, phases, precipitates and micropores.
Keywords: 3D characterization; focused ion beam; scanning electron microscopy
Project no.: CEZ:AV0Z10100520 (CEP)
Host item entry: Metal 2010 - 19th international conference on metallurgy and materials, ISBN 978-80-87294-15-4

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0191410

Permalink: http://www.nusl.cz/ntk/nusl-42142


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