Original title: Electron optical properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
Authors: Konvalina, Ivo ; Hovorka, Miloš ; Müllerová, Ilona
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Year: 2010
Language: eng
Abstract: Cathode lens (CL) is an electron optical element commonly used in the photo-emission electron microscopy (PEEM), low energy electron microscopy (LEEM) and last but not least in the scanning electron microscopy (SEM). We have used the EOD software for calculation of aberration coefficients for the sequential and overlapped fields.
Keywords: cathode lens; EOD software; LEEM; PEEM; SEM
Project no.: CEZ:AV0Z20650511 (CEP), IAA100650902 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0190599

Permalink: http://www.nusl.cz/ntk/nusl-41920


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers