Original title: Relation between optical and microscopic properties of hydrogenated silicon thin films with integrated germanium and tin nanoparticles
Authors: Stuchlík, Jiří ; Stuchlíková, The-Ha ; Čermák, Jan ; Kupčík, Jaroslav ; Fajgar, Radek ; Remeš, Zdeněk
Document type: Papers
Conference/Event: NANOCON 2018 -International Conference on Nanomaterials - Research and Application /10./, Brno (CZ), 20181017
Year: 2019
Language: eng
Abstract: The hydrogenated amorphous silicon layers (a-Si:H) were deposited by PECVD method on quartz substrates. During interruption of PECVD process the vacuum chamber was pumped up to 10-5 Pa and 1 nm thin films of Germanium or Tin were evaporated on the surface. The materials form isolated nanoparticles (NPs) on the a-Si:H surface. Then the deposited NPs were covered and stabilized by a-Si:H layer by PECVD. Those two deposition processes were alternated 5 times. The a-Si:H thin films with integrated Ge or Sn NPs were characterized optically by PDS and CPM methods, and microscopically by SEM and AFM microscopies. Optical and microscopic properties of the structures are correlated and discussed considering their application in photovoltaics.\n
Keywords: a-Si:H; germanium; nanoparticles; thin films; tin
Project no.: CZ.02.1.01/0.0/0.0/16_019/0000760, EF16_019/0000760, LTC17029, GC16-10429J (CEP)
Funding provider: OP VVV - SOLID21, GA MŠk, GA MŠk, GA ČR
Host item entry: NANOCON 2018 : Conference Proceedings of the International Conference on Nanomaterials - Research & Application /10./, ISBN 978-80-87294-89-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available in the digital repository of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0307159

Permalink: http://www.nusl.cz/ntk/nusl-410814


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