Original title: Modular Monte Carlo Simulation Including Secondary Electron Raytracing
Authors: Gnieser, D. ; Frase, C. G. ; Bosse, H. ; Konvalina, Ivo ; Müllerová, Ilona
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /11./, Skalský dvůr (CZ), 2008-07-14 / 2008-07-18
Year: 2008
Language: eng
Abstract: A Monte Carlo simulation program for the modeling of image formation in scanning electron microscopy is presented. A key feature of the program is its modular design, so the different aspects of image formation (i.e. forming of the electron probe, specimen topography model, probe-sample-interaction, electron detector model, image processing) are arranged in separate program modules. The program is written in C++ and uses object-oriented programming techniques. Data exchange between the different program modules is performed by defined software interfaces. Thus, third party simulation code can easily be integrated into the program.
Keywords: Monte Carlo simulation; SEM
Project no.: CEZ:AV0Z20650511 (CEP)
Host item entry: Proceedings of the 11th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-0905-3

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0180235

Permalink: http://www.nusl.cz/ntk/nusl-40999


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers