Original title:
Modular Monte Carlo Simulation Including Secondary Electron Raytracing
Authors:
Gnieser, D. ; Frase, C. G. ; Bosse, H. ; Konvalina, Ivo ; Müllerová, Ilona Document type: Papers Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /11./, Skalský dvůr (CZ), 2008-07-14 / 2008-07-18
Year:
2008
Language:
eng Abstract:
A Monte Carlo simulation program for the modeling of image formation in scanning electron microscopy is presented. A key feature of the program is its modular design, so the different aspects of image formation (i.e. forming of the electron probe, specimen topography model, probe-sample-interaction, electron detector model, image processing) are arranged in separate program modules. The program is written in C++ and uses object-oriented programming techniques. Data exchange between the different program modules is performed by defined software interfaces. Thus, third party simulation code can easily be integrated into the program.
Keywords:
Monte Carlo simulation; SEM Project no.: CEZ:AV0Z20650511 (CEP) Host item entry: Proceedings of the 11th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-0905-3
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0180235