Název:
Modular Monte Carlo Simulation Including Secondary Electron Raytracing
Autoři:
Gnieser, D. ; Frase, C. G. ; Bosse, H. ; Konvalina, Ivo ; Müllerová, Ilona Typ dokumentu: Příspěvky z konference Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /11./, Skalský dvůr (CZ), 2008-07-14 / 2008-07-18
Rok:
2008
Jazyk:
eng
Abstrakt: A Monte Carlo simulation program for the modeling of image formation in scanning electron microscopy is presented. A key feature of the program is its modular design, so the different aspects of image formation (i.e. forming of the electron probe, specimen topography model, probe-sample-interaction, electron detector model, image processing) are arranged in separate program modules. The program is written in C++ and uses object-oriented programming techniques. Data exchange between the different program modules is performed by defined software interfaces. Thus, third party simulation code can easily be integrated into the program.
Klíčová slova:
Monte Carlo simulation; SEM Číslo projektu: CEZ:AV0Z20650511 (CEP) Zdrojový dokument: Proceedings of the 11th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-0905-3
Instituce: Ústav přístrojové techniky AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0180235