Original title: Transmission of Electrons through Thin Films by Scanning Low Energy Electron Microscopy
Authors: Müllerová, Ilona ; Hovorka, Miloš ; Fořt, Tomáš ; Frank, Luděk
Document type: Papers
Conference/Event: CJCS’09 - Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology /4./, Brno (CZ), 2009-08-10 / 2009-08-14
Year: 2009
Language: eng
Abstract: For examination of thin films by transmitted electrons (TE) the Transmission Electron Microscope is used at primary beam energies in hundreds of keV. The Scanning Electron Microscopes (SEM) utilize reflected electrons in order to image surfaces but recently the TE mode has been introduced into SEM at much lower electron energies.
Keywords: scanning low energy electron microscopes; transmission electron microscope
Project no.: CEZ:AV0Z20650511 (CEP), IAA100650902 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 4th Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology (CJCS’09), ISBN 978-80-254-4535-8

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0179802

Permalink: http://www.nusl.cz/ntk/nusl-40968


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers