Original title: Grain Contrast in Very Low Energy SEM
Translated title: Kontrast zrn na velmi nízkých energiích v REM
Authors: Pokorná, Zuzana ; Frank, Luděk
Document type: Papers
Conference/Event: Multinational Congress on Microscopy /8./, Prague (CZ), 2007-06-17 / 2007-06-21
Year: 2007
Language: eng
Abstract: [eng] [cze]
When lowering energy of incident electrons to 100 eV and less, the elastic scattering becomes heavily anisotropic while the inelastic scattering progressively drops off. Energy dependence of the reflected signal becomes then specific to the crystal orientation. The experiments with the imaging of the metal polycrystals were done in the SEM equipped by the cathode lens. Při snižování energie dopadajících elektronů na 100 eV a méně se pružný rozptyl stává silně anizotropní, zatímco nepružný rozptyl výrazně klesá. Energiová závislost odraženého signálu se pak stává specifická pro určitou krystalovou orientaci. Experimenty umožňující takto zobrazení kovových polykrystalů byly provedeny v REM vybaveném katodovou čočkou.
Keywords: grain contrast; SEM; very low energy
Project no.: CEZ:AV0Z20650511 (CEP), GA202/04/0281 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 8th Multinational Congress on Microscopy, ISBN 978-80-239-9397-4

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0160884

Permalink: http://www.nusl.cz/ntk/nusl-38788


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