Original title:
SMV-2017-23: Optimalizace nanolitografie
Translated title:
SMV-2017-23: Optimization of nanolitography
Authors:
Jákl, Petr ; Šerý, Mojmír Document type: Research reports
Year:
2017
Language:
cze Abstract:
[cze][eng] Zlepšení rozlišení dvoufotonové fotopolymerace pomocí odstranění optických aberací a optimalizace ohniska laserového svazku.Two-photon photopolymerization technique was improved by decreasing optical aberrations and optimization of laser beam.
Keywords:
laser beam shaping; two photon photopolymerization
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0278450