Original title: IR Laser-induced Chemical Vapour Deposition of Polyselenocarbosilane Films
Translated title: IC laserově iniciovaná chemická deposice polyselenokarbosilanových filmů z plynné fáze
Authors: Santos, M. ; Díaz, L. ; Pola, Josef
Document type: Papers
Conference/Event: Reunión Nacional de Espectroscopia (RNE) y IV Congresso Ibérico de Espectroscopia (CIE) /20./, Ciúdad Real (ES), 2006-09-10 / 2006-09-14
Year: 2006
Language: eng
Abstract: [eng] [cze]
IR laser chemical vapour deposition of polycarbosilane films have been carrioed out by IR laser co-thermolysis of 1,3-disilacyclobuitane and dimethyl selenide. IC laserově iniciovaná deposice polykarbosilanových filmů z plynné fáze byla provedena IC-laserovou ko-pyrolýzou 1,3-disilacyklobutanu a dimethyl selenidu.
Keywords: chemical vapour deposition
Project no.: CEZ:AV0Z40720504 (CEP)
Host item entry: Book of Abstracts

Institution: Institute of Chemical Process Fundamentals AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0143029

Permalink: http://www.nusl.cz/ntk/nusl-36617


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Research > Institutes ASCR > Institute of Chemical Process Fundamentals
Conference materials > Papers