Original title:
IR Laser-induced Chemical Vapour Deposition of Polyselenocarbosilane Films
Translated title:
IC laserově iniciovaná chemická deposice polyselenokarbosilanových filmů z plynné fáze
Authors:
Santos, M. ; Díaz, L. ; Pola, Josef Document type: Papers Conference/Event: Reunión Nacional de Espectroscopia (RNE) y IV Congresso Ibérico de Espectroscopia (CIE) /20./, Ciúdad Real (ES), 2006-09-10 / 2006-09-14
Year:
2006
Language:
eng Abstract:
[eng][cze] IR laser chemical vapour deposition of polycarbosilane films have been carrioed out by IR laser co-thermolysis of 1,3-disilacyclobuitane and dimethyl selenide.IC laserově iniciovaná deposice polykarbosilanových filmů z plynné fáze byla provedena IC-laserovou ko-pyrolýzou 1,3-disilacyklobutanu a dimethyl selenidu.
Keywords:
chemical vapour deposition Project no.: CEZ:AV0Z40720504 (CEP) Host item entry: Book of Abstracts
Institution: Institute of Chemical Process Fundamentals AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0143029