Original title: Detection of Signal Electrons in the Low Voltage SEM
Translated title: Detekce signálních elektronů v nízkonapěťové SEM
Authors: Wandrol, Petr ; Müllerová, Ilona
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./, Skalský dvůr (CZ), 2006-05-22 / 2006-05-26
Year: 2006
Language: eng
Abstract: [eng] [cze]
This paper deals with the detection of signal electrons in the SEM at primary beam energies of 3 keV and less. Special attention is paid to the detection of backscattered electrons which is at low primary beam energies very problematic. Práce se zabývá detekcí signálních elektronů v SEM při energiích primárního svazku 3 keV a nižších. Zvláštní zřetel je brán na detekci zpětně odražených elektronů, která je při nízkých energiích primárního svazku problematická.
Keywords: detection; low voltage SEM; signal electrons
Project no.: CEZ:AV0Z20650511 (CEP), KJB200650501 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 80-239-6285-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0139520

Permalink: http://www.nusl.cz/ntk/nusl-36254


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers