Original title: Characterization of rainbowlike hanze on (111) Si wafers
Authors: Seďa, Bohuslav ; Englišová, V.
Document type: Papers
Conference/Event: SILICON 2002, Rožnov pod Radhoštěm (CZ), 2002-11-05 / 2002-11-08
Year: 2002
Language: eng
Abstract: Silicon single crystals used in microelectronic industry are mostly grownin crystalline orientations (111) or (100). These crystals are processed to polished wafers by several technological steps. The first one is their cutting. The crystals in crystalline orientation (111) are usually cut with off-orientation up to 4 degrees of (111) crystalline plane. Only wafers for some special applications are cut with zero off-orientation. A specialoptical feature of polished surface of (111) silicon wafers cut with zerooff-orientation is presentsed in this paper.
Keywords: crystalline orientations; optical feature; single crystals
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of scientific and business conference

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101159

Permalink: http://www.nusl.cz/ntk/nusl-29565


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers