Original title: X-ray microanalysis in ESEM and LV SEM
Authors: Autrata, Rudolf ; Jirák, Josef ; Špinka, Jiří
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: The scattering of primary electrons to so-called skirt, appearing in the range of pressures used in regimes of LV SEM (low vacuum) as well as in ESEM, has no substantial influence on the spatial resolution for commonly used types of imaging in the scanning electron microscope. It demonstrates itself just as a higher share of the noise signal. What is more, it brings known substantial advantages, as that no preparation of modification of non-conductive samples is needed and observation of liquid phase containing specimens is made possible.
Keywords: electron microscope; low vacuum; primary electron
Project no.: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101122

Permalink: http://www.nusl.cz/ntk/nusl-29555


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers