Název:
X-ray microanalysis in ESEM and LV SEM
Autoři:
Autrata, Rudolf ; Jirák, Josef ; Špinka, Jiří Typ dokumentu: Příspěvky z konference Konference/Akce: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Rok:
2002
Jazyk:
eng
Abstrakt: The scattering of primary electrons to so-called skirt, appearing in the range of pressures used in regimes of LV SEM (low vacuum) as well as in ESEM, has no substantial influence on the spatial resolution for commonly used types of imaging in the scanning electron microscope. It demonstrates itself just as a higher share of the noise signal. What is more, it brings known substantial advantages, as that no preparation of modification of non-conductive samples is needed and observation of liquid phase containing specimens is made possible.
Klíčová slova:
electron microscope; low vacuum; primary electron Číslo projektu: CEZ:AV0Z2065902 (CEP), GA102/01/1271 (CEP) Poskytovatel projektu: GA ČR Zdrojový dokument: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0101122