Original title: Measurement of the critical energy in the SEM equipped with the cathode lens
Authors: Zobačová, Jitka ; Müllerová, Ilona ; Hutař, Otakar ; Frank, Luděk
Document type: Papers
Conference/Event: EMAS 2000 - Regional Workshop on Electron Probe Microanalysis Today /4./, Třešť (CZ), 2000-05-17 / 2000-05-20
Year: 2000
Language: eng
Abstract: Charge absorbed in a specimen during observation in SEM is a result of unbalance between incoming and emitted electrons. In a nonconductive specimen, the charge remains localized and the electric field influences the trajectories of both the primary beam and the signal electrons moving toward a detctor so that the geometry as well as the intensity scale of the image are damaged. Among the methods invented to avoid the surface charging, imaging at critical energies belongs to the most progressive ones.
Project no.: CEZ:AV0Z2065902 (CEP), GA202/99/0008 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings EMAS 2000 - 4th Regional Workshop on Electron Probe Microanalysis Today - Practical Aspects, ISBN 80-01-02176-9
Note: Související webová stránka: mailto:kanova@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100888

Permalink: http://www.nusl.cz/ntk/nusl-29485


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers