Original title: Detection of angular distribution of the signal electrons in VLESEM
Authors: Horáček, Miroslav
Document type: Papers
Conference/Event: EUREM /12./ - European Congress on Electron Microscopy, Brno (CZ), 2000-07-09 / 2000-07-14
Year: 2000
Language: eng
Abstract: The aim of this work is to design a detector for the angle and energy-selective detection of signal electrons in very low energy scanning electron microscopy (VLESEM), based on the directly electron-bombarded CCD sensor (EBCCD). The planar CCD sensor is very suitable for conversion of the area information carried by impinging electrons of the signal beam into the electrical signal that can be further processed.
Project no.: CEZ:AV0Z2065902 (CEP), GA102/00/P001 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 12th European Congress on Electron Microscopy, ISBN 80-238-5503-4
Note: Související webová stránka: mailto:mih@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100872

Permalink: http://www.nusl.cz/ntk/nusl-29474


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers