Original title: Effect of the electron beam accelerating voltage and of specimen coating on the image in the microscope operating at higher pressures
Authors: Autrata, Rudolf ; Jirák, Josef ; Špinka, Jiří
Document type: Papers
Conference/Event: EUREM /12./ - European Congress on Electron Microscopy, Brno (CZ), 2000-07-09 / 2000-07-14
Year: 2000
Language: eng
Abstract: The contribution is oriented to the area of scanning electron microscopy operated in the specimen chamber at higher pressures reaching hundreds to thousands of Pa. It deals with questions of signal detection and with the study of the effect of parameters of the incident primary electron beam on signal detection.
Project no.: CEZ:AV0Z2065902 (CEP), GA102/00/0969 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 12th European Congress on Electron Microscopy, ISBN 80-238-5503-4
Note: Související webová stránka: mailto:autrata@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100869

Permalink: http://www.nusl.cz/ntk/nusl-29471


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers