Original title: Dimension measurement in a cathode lens equipped low-energy SEM
Authors: Hutař, Otakar ; Oral, Martin ; Müllerová, Ilona ; Frank, Luděk
Document type: Papers
Conference/Event: EUREM /12./ - European Congress on Electron Microscopy, Brno (CZ), 2000-07-09 / 2000-07-14
Year: 2000
Language: eng
Abstract: The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed.
Project no.: CEZ:AV0Z2065902 (CEP), IBS2065017 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 12th European Congress on Electron Microscopy, ISBN 80-238-5503-4
Note: Související webová stránka: mailto:ota@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100857

Permalink: http://www.nusl.cz/ntk/nusl-29459


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers