Original title: Low voltage SEM applications in semiconductor devices
Authors: Müllerová, Ilona ; Frank, Luděk
Document type: Papers
Conference/Event: NANO '94 - Nanometrology Scanning Probe Microscopy and Related Techniques, Brno (CZ), 1994-08-29 / 1994-08-30
Year: 1994
Language: eng
Host item entry: NANO '94. International Conference on Nanometrology Scanning Probe Microscopy and Related Techniques, ISBN 80-85895-02-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100261

Permalink: http://www.nusl.cz/ntk/nusl-29323


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers