Original title:
Low voltage SEM applications in semiconductor devices
Authors:
Müllerová, Ilona ; Frank, Luděk Document type: Papers Conference/Event: NANO '94 - Nanometrology Scanning Probe Microscopy and Related Techniques, Brno (CZ), 1994-08-29 / 1994-08-30
Year:
1994
Language:
eng Host item entry: NANO '94. International Conference on Nanometrology Scanning Probe Microscopy and Related Techniques, ISBN 80-85895-02-1
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0100261