Original title: Friction characteristics of r.f. magnetron sputtered C thin films
Authors: Sobota, Jaroslav
Document type: Papers
Conference/Event: EDS '94 - Electronic Devices and Systems Conference, Brno (CZ), 1994-11-22 / 1994-11-23
Year: 1994
Language: eng
Host item entry: Proceedings of Electronic Devices and Systems Conference 1994

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100241

Permalink: http://www.nusl.cz/ntk/nusl-29319


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers