Original title:
Friction characteristics of r.f. magnetron sputtered C thin films
Authors:
Sobota, Jaroslav Document type: Papers Conference/Event: EDS '94 - Electronic Devices and Systems Conference, Brno (CZ), 1994-11-22 / 1994-11-23
Year:
1994
Language:
eng Host item entry: Proceedings of Electronic Devices and Systems Conference 1994
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0100241