Original title: Tenké vrstvy připravené v RF doutnavém výboji a jejich fyzikálně-chemické vlastnosti
Translated title: Thin films prepared in RF glow discharge and their physico-chemical properties
Authors: Bránecký, Martin ; Boušek, Jaroslav (referee) ; Čech, Vladimír (advisor)
Document type: Master’s theses
Year: 2015
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Abstract: [cze] [eng]

Keywords: FT-IR; mass spectroscopy; PE-CVD; plasma; spectroscopic ellipsometry; tetravinylsilane (TVS).; Thin film; FT-IR; hmotnostná spektroskopia; PE-CVD; plazma; spektroskopická elipsometria; Tenké vrstvy; tetravinylsilan (TVS).

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/39164

Permalink: http://www.nusl.cz/ntk/nusl-221284


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2016-06-03, last modified 2022-09-04


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