Original title: Nanocrystalline diamond films preparation by hybrid pulsed laser deposition
Translated title: Nanokrystalické diamantové vrstvy deponované hybridní pulsní laserovou depozicí
Authors: Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Lančok, Ján ; Vorlíček, Vladimír
Document type: Papers
Conference/Event: Workshop 2004, Praha (CZ), 2004-03-22 / 2004-03-26
Year: 2004
Language: eng
Abstract: [eng] [cze]
We used pulsed laser deposition (PLD) and hybrid PLD (HPLD) techniques for NCD thin films preparation. KrF excimer laser beam (Lumonics, .lambda.=248 nm , 20 ns, 500 mJ) was focused on graphite target with energy density of 4-7 J.cm.sup.- 2./sup.. Films were deposited on sapphire and Si(100) substrates in hydrogen and argon/hydrogen ambient Metody pulsní laserové depozice (PLD) a hybridní PLD (HPLD) byli použity pro přípravu NCD tenkých vrstev. Excimerový KrF laser byl fokusován na grafitový terč a vrstvy připraveny na safírové a Si(100) podložky ve vodíkové a agrón/vodíkové atmosférách
Keywords: nanocrystalline diamond; pulsed laser deposition
Project no.: CEZ:AV0Z1010914 (CEP), IAA1010110 (CEP), LN00A015 (CEP)
Funding provider: GA AV ČR, GA MŠk
Host item entry: Proceedings of Workshop 2004

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0009832

Permalink: http://www.nusl.cz/ntk/nusl-19420


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Research > Institutes ASCR > Institute of Physics
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