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Original title:
Plasmonic Structures In PMMA Resist
Authors: Urbánek, Michal ; Krátký, Stanislav ; Šimík, M. ; Kolařík, Vladimír ; Horáček, Miroslav ; Matějka, Milan
Document type: Papers
Conference/Event: NANOCON 2014. International Conference /6./, Brno (CZ), 2014-11-05 / 2014-11-07
Year: 2014
Language: eng
Abstract: Some metal material can exhibit special physical phenomenon which is called plasmon resonance. This effect can be used in optical applications where designed structures, using this effect, have special function as optical filters, polarizers, holograms etc. This papers deals with preparation of plasmonic structures in poly(methyl methacrylate) (PMMA) resist which is the most common material used for e-beam processing. Designed structures were prepared by e-beam writer with Gaussian beam and accelerating voltage of 100 kV. These structures are usually prepared into negative tone resist hydrogen silsesquioxane (HSQ). We prepared these structures by unusual way into positive resist PMMA due to unavailability and cost of HSQ resist. By this way we are able to achieve high resolution of structures suitable for special optical application. Exposed structures were developed in isopropyl based developer. Final structures after development were coated by two metal layers (first one is Ag layer, second one is gold) by magnetron sputtering and vacuum evaporation. The quality of prepared plasmonic structures was examined by confocal laser scanning microscopy (CLSM) and scanning electron microscopy (SEM).
Keywords: electron beam lithography; metal coating; plasmonic structures; PMMA
Project no.: ED0017/01/01, LO1212 (CEP), TE01020233 (CEP)
Funding provider: GA MŠk, GA MŠk, GA TA ČR
Host item entry: NANOCON 2014. 6th International conference proceedings, ISBN 978-80-87294-55-0
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0241317
Permalink: http://www.nusl.cz/ntk/nusl-178286
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Urbánek, Michal ; Krátký, Stanislav ; Šimík, M. ; Kolařík, Vladimír ; Horáček, Miroslav ; Matějka, Milan
Document type: Papers
Conference/Event: NANOCON 2014. International Conference /6./, Brno (CZ), 2014-11-05 / 2014-11-07
Year: 2014
Language: eng
Abstract: Some metal material can exhibit special physical phenomenon which is called plasmon resonance. This effect can be used in optical applications where designed structures, using this effect, have special function as optical filters, polarizers, holograms etc. This papers deals with preparation of plasmonic structures in poly(methyl methacrylate) (PMMA) resist which is the most common material used for e-beam processing. Designed structures were prepared by e-beam writer with Gaussian beam and accelerating voltage of 100 kV. These structures are usually prepared into negative tone resist hydrogen silsesquioxane (HSQ). We prepared these structures by unusual way into positive resist PMMA due to unavailability and cost of HSQ resist. By this way we are able to achieve high resolution of structures suitable for special optical application. Exposed structures were developed in isopropyl based developer. Final structures after development were coated by two metal layers (first one is Ag layer, second one is gold) by magnetron sputtering and vacuum evaporation. The quality of prepared plasmonic structures was examined by confocal laser scanning microscopy (CLSM) and scanning electron microscopy (SEM).
Keywords: electron beam lithography; metal coating; plasmonic structures; PMMA
Project no.: ED0017/01/01, LO1212 (CEP), TE01020233 (CEP)
Funding provider: GA MŠk, GA MŠk, GA TA ČR
Host item entry: NANOCON 2014. 6th International conference proceedings, ISBN 978-80-87294-55-0
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0241317
Permalink: http://www.nusl.cz/ntk/nusl-178286
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2015-01-05, last modified 2021-11-24