Název:
Perspectives in diamond thin film technology
Autoři:
Kromka, Alexander Typ dokumentu: Příspěvky z konference Konference/Akce: Winter Education Seminar /3. /, Rokytnice nad Jizerou (CZ), 2012-02-01 / 04.02. 2012
Rok:
2012
Jazyk:
eng
Abstrakt: Synthetic diamond thin films are routinely grown over world not only for basic research but also for industrial uses. At the Institute of Physics (IoP), diamond thin films are grown since 2002. The first installed deposition system is base on microwave plasma enhanced chemical vapor deposition (CVD) in hydrogen reach gas mixture (<2% methane diluted in hydrogen). This system is well suitable for fast growth of high quality diamond films up to 5 cm in diameter. The main advance of the system is cavity like resonator which allows running stable CVD process for several days at relatively high pressures (>200 mbar).
Klíčová slova:
growth of NCD; MW-PECVD; nanocrystalline diamond; nucleation of NCD Číslo projektu: GBP108/12/G108 (CEP), IAAX00100902 (CEP) Poskytovatel projektu: GA ČR, GA AV ČR Zdrojový dokument: Proceedings of the 3rd Winter Education Seminar in Rokytnice nad Jizerou 2012, ISBN 978-80-260-3425-4
Instituce: Fyzikální ústav AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0225882