guest ::
| Home > Conference materials > Papers > Interferometric coordinates measurement sytem for local probe microscopy nanometrology |
Original title:
Interferometric coordinates measurement sytem for local probe microscopy nanometrology
Authors: Hrabina, Jan ; Lazar, Josef ; Klepetek, P. ; Číp, Ondřej ; Čížek, Martin ; Holá, Miroslava ; Šerý, Mojmír
Document type: Papers
Conference/Event: NANOCON 2013. International Conference /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Year: 2014
Language: eng
Abstract: We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Keywords: Interferometry; Local probe microscopy; Nanometrology; Nanopositioning; Traceability
Project no.: GPP102/11/P820 (CEP), FR-TI2/705 (CEP), TA01010995 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, EE2.4.31.0016
Funding provider: GA ČR, GA MPO, GA TA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: NANOCON 2013, 5TH INTERNATIONAL CONFERENCE, ISBN 978-80-87294-47-5
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225471
Permalink: http://www.nusl.cz/ntk/nusl-161373
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Hrabina, Jan ; Lazar, Josef ; Klepetek, P. ; Číp, Ondřej ; Čížek, Martin ; Holá, Miroslava ; Šerý, Mojmír
Document type: Papers
Conference/Event: NANOCON 2013. International Conference /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Year: 2014
Language: eng
Abstract: We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Keywords: Interferometry; Local probe microscopy; Nanometrology; Nanopositioning; Traceability
Project no.: GPP102/11/P820 (CEP), FR-TI2/705 (CEP), TA01010995 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, EE2.4.31.0016
Funding provider: GA ČR, GA MPO, GA TA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: NANOCON 2013, 5TH INTERNATIONAL CONFERENCE, ISBN 978-80-87294-47-5
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225471
Permalink: http://www.nusl.cz/ntk/nusl-161373
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-11-05, last modified 2021-11-24