Original title: Polishing a polymer interlayers for diamond-diamond wafer bonding
Authors: Babchenko, Oleg ; Verveniotis, Elisseos ; Ledinský, Martin ; Rezek, Bohuslav ; Vallin, Ö. ; Kromka, Alexander
Document type: Papers
Conference/Event: International Workshop on Diamond Nanotechnology and Science Progress, Prague (CZ), 2011-06-15 / 2011-06-17
Year: 2012
Language: eng
Abstract: Surfaces of as-grown samples had high local peaks (detected by white light interferometer) that impede diamond to diamond bonding as directly as by employing interlayer polymer.
Keywords: AFM; focused plasma; linear antenna plasma; nanocrystalline diamond; SEM
Project no.: CEZ:AV0Z10100521 (CEP)
Host item entry: Proceedings of the International Workshop on Diamond Nanotechnology and Science Progress - DINAS 2011, ISBN 978-80-260-1593-2

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0220756

Permalink: http://www.nusl.cz/ntk/nusl-152765


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers