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Original title:
Polishing a polymer interlayers for diamond-diamond wafer bonding
Authors:
Babchenko, Oleg
;
Verveniotis, Elisseos
;
Ledinský, Martin
;
Rezek, Bohuslav
;
Vallin, Ö.
;
Kromka, Alexander
Document type:
Papers
Conference/Event:
International Workshop on Diamond Nanotechnology and Science Progress
, Prague (CZ), 2011-06-15 / 2011-06-17
Year:
2012
Language:
eng
Abstract:
Surfaces of as-grown samples had high local peaks (detected by white light interferometer) that impede diamond to diamond bonding as directly as by employing interlayer polymer.
Keywords:
AFM
;
focused plasma
;
linear antenna plasma
;
nanocrystalline diamond
;
SEM
Project no.:
CEZ:AV0Z10100521
(
CEP
)
Host item entry:
Proceedings of the International Workshop on Diamond Nanotechnology and Science Progress - DINAS 2011, ISBN 978-80-260-1593-2
Institution:
Institute of Physics AS ČR (
web
)
Document availability information:
Fulltext is available at the institute of the Academy of Sciences.
Original record:
http://hdl.handle.net/11104/0220756
Permalink:
http://www.nusl.cz/ntk/nusl-152765
The record appears in these collections:
Research
>
Institutes ASCR
>
Institute of Physics
Conference materials
>
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Record created 2013-04-17, last modified 2021-11-24
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