Original title: Determination of mechanical properties from microcompression test
Authors: Truhlář, Michal ; Kruml, Tomáš ; Kuběna, Ivo ; Petráčková, Klára ; Náhlík, Luboš
Document type: Papers
Conference/Event: Engineering Mechanics 2012 /18./, Svratka (CZ), 2012-05-14 / 2012-05-17
Year: 2012
Language: eng
Abstract: This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
Keywords: FEM; focused ion beam; microcompression; thin film properties; Young modulus
Host item entry: Engineering Mechanics 2012, ISBN 978-80-86246-40-6

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0216798

Permalink: http://www.nusl.cz/ntk/nusl-136104


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