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Original title:
Quality assessment of scintillation detector in SEM using MFT
Authors: Bok, Jan ; Schauer, Petr
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
Keywords: e-beam scanning speed; modulation transfer function; scintillation detector in SEM
Project no.: GAP102/10/1410 (CEP), EE.2.3.20.0103
Funding provider: GA ČR, GA MŠk
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215685
Permalink: http://www.nusl.cz/ntk/nusl-135991
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Bok, Jan ; Schauer, Petr
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
Keywords: e-beam scanning speed; modulation transfer function; scintillation detector in SEM
Project no.: GAP102/10/1410 (CEP), EE.2.3.20.0103
Funding provider: GA ČR, GA MŠk
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215685
Permalink: http://www.nusl.cz/ntk/nusl-135991
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-01-16, last modified 2021-11-24