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Název:
Quality assessment of scintillation detector in SEM using MFT
Autoři: Bok, Jan ; Schauer, Petr
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Rok: 2012
Jazyk: eng
Abstrakt: One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
Klíčová slova: e-beam scanning speed; modulation transfer function; scintillation detector in SEM
Číslo projektu: GAP102/10/1410 (CEP), EE.2.3.20.0103
Poskytovatel projektu: GA ČR, GA MŠk
Zdrojový dokument: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0215685
Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-135991
Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference
Autoři: Bok, Jan ; Schauer, Petr
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Rok: 2012
Jazyk: eng
Abstrakt: One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
Klíčová slova: e-beam scanning speed; modulation transfer function; scintillation detector in SEM
Číslo projektu: GAP102/10/1410 (CEP), EE.2.3.20.0103
Poskytovatel projektu: GA ČR, GA MŠk
Zdrojový dokument: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0215685
Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-135991
Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference
Záznam vytvořen dne 2013-01-16, naposledy upraven 2021-11-24.