Název:
Photolithographic technique for controlled fabrication of metal structures
Autoři:
Jusková, Petra ; Hegrová, Jitka ; Foret, František Typ dokumentu: Příspěvky z konference Konference/Akce: CECE 2012. International Interdisciplinary Meeting on Bioanalysis /9./, Brno (CZ), 2012-11-01 / 2012-11-02
Rok:
2012
Jazyk:
eng
Abstrakt: We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer.
Klíčová slova:
metal microstructures; microfabrication; photolithography Číslo projektu: GAP301/11/2055 (CEP), GBP206/12/G014 (CEP) Poskytovatel projektu: GA ČR, GA ČR Zdrojový dokument: CECE 2012. 9th International Interdisciplinary Meeting on Bioanalysis, ISBN 978-80-904959-1-3 Poznámka: Související webová stránka: http://hdl.handle.net/11104/0215413
Instituce: Ústav analytické chemie AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v repozitáři Akademie věd. Původní záznam: http://hdl.handle.net/11104/0215413